ZnO and aluminium doped ZnO thin films synthesis by ultrasonic spray pyrolysis technique
תקציר
Zinc oxide films and aluminum doped zinc oxide films were prepared by specially designed apparatus for ultrasonic spray pyrolysis. Atomization of precursor solution was produced using an ultrasonic transducer at resonant frequency 1.7 ± 0.085 MHz. The resulting films thickness is less than 400 nm, average roughness is about 40 nm, and transmittance is more than 85 % in the visible range. Undoped zinc oxide films also showed piezoelectric properties, which proved with piezoresponse force microscopy. The average sheet resistance of aluminum doped zinc oxide films is 200 kOhm. The surface of thin films is smooth, zinc oxide grains have a small size dispersion.
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כיצד לצטט
@inproceedings{eiconrus-zno-spray-2017,
author = {Fedoseev, Alexander G. and Lashkova, Natalia A. and Matyushkin, L. B.},
title = {ZnO and aluminium doped ZnO thin films synthesis by ultrasonic spray pyrolysis technique},
booktitle = {2017 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus)},
pages = {1391--1393},
year = {2017},
doi = {10.1109/eiconrus.2017.7910829}
}